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Hikavyy, Andriy
Interuniversity Microelectronics Centre (IMEC)
Belgium, Лёвен
Report
Zyulkov I.J.
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Hikavyy A.
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Strained SiGe layers growth with digermane/disilane precursors combination
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ОАО "Научно исследовательский институт молекулярной электроники" (Moscow), Russia
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Interuniversity Microelectronics Centre (IMEC) (Лёвен), Belgium
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