Gorobchuk, Aleksey Gennadyevich
Senior Research Scientist, Ph.D. in Physics and MathematicsInstitute of Computational Technologies SB RAS
http://www.ict.nsc.ru
Russia, 630090, Novosibirsk, Acad. Lavrentjev Ave., 6
Phone: +7(383) 330-61-50, Fax: +7(383) 330-63-42
Report
- Gorobchuk A.G.*
Numerical modeling of plasma-chemical processes in microelectronics
*Institute of Computational Technologies SB RAS (Novosibirsk), Russia